Extreme ultraviolet

Results: 330



#Item
21JOURNAL OF APPLIED PHYSICS 102, 023301 共2007兲 Lifetime measurements on collector optics from Xe and Sn extreme ultraviolet sources S. N. Srivastava,a兲 K. C. Thompson, E. L. Antonsen, H. Qiu, J. B. Spencer, D. Papk

JOURNAL OF APPLIED PHYSICS 102, 023301 共2007兲 Lifetime measurements on collector optics from Xe and Sn extreme ultraviolet sources S. N. Srivastava,a兲 K. C. Thompson, E. L. Antonsen, H. Qiu, J. B. Spencer, D. Papk

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Source URL: cpmi.illinois.edu

Language: English - Date: 2015-04-22 08:46:31
    22J. Micro/Nanolith. MEMS MOEMS 6!2

    J. Micro/Nanolith. MEMS MOEMS 6!2", 023005 !Apr–Jun 2007" Plasma cleaning of lithium off of collector optics material for use in extreme ultraviolet lithography applications Martin J. Neumann

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    Language: English - Date: 2015-04-22 08:46:31
      23Tin removal from extreme ultraviolet collector optics by inductively coupled plasma reactive ion etching H. Shin,a兲 S. N. Srivastava, and D. N. Ruzicb兲 Center for Plasma Material Interactions, University of Illinois

      Tin removal from extreme ultraviolet collector optics by inductively coupled plasma reactive ion etching H. Shin,a兲 S. N. Srivastava, and D. N. Ruzicb兲 Center for Plasma Material Interactions, University of Illinois

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      Language: English - Date: 2015-04-22 08:46:31
        24Magnetic debris mitigation system for extreme ultraviolet sources Daniel T. Elg John R. Sporre Davide Curreli Ivan A. Shchelkanov

        Magnetic debris mitigation system for extreme ultraviolet sources Daniel T. Elg John R. Sporre Davide Curreli Ivan A. Shchelkanov

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        Language: English - Date: 2015-04-22 08:46:32
          25J. Microlith., Microfab., Microsyst. 5共3兲, 033007 共Jul–Sep 2006兲 Optical exposure characterization and comparisons for discharge produced plasma Sn extreme ultraviolet system Huatan Qiu

          J. Microlith., Microfab., Microsyst. 5共3兲, 033007 共Jul–Sep 2006兲 Optical exposure characterization and comparisons for discharge produced plasma Sn extreme ultraviolet system Huatan Qiu

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            26Roger F. Malina Titres et Travaux au 9 Decembre 2009 Livres Extreme Ultraviolet Astronomy, ed. R. F. Malina and S. Bowyer, New York: Pergamon Press, 1991.

            Roger F. Malina Titres et Travaux au 9 Decembre 2009 Livres Extreme Ultraviolet Astronomy, ed. R. F. Malina and S. Bowyer, New York: Pergamon Press, 1991.

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            Source URL: www.diatrope.com

            Language: English - Date: 2010-01-25 21:11:48
              27Earth Planets Space, 60, 407–416, 2008 Telescope of extreme ultraviolet (TEX) onboard SELENE: science from the Moon I. Yoshikawa1 , A. Yamazaki2 , G. Murakami1 , K. Yoshioka1 , S. Kameda2 , F. Ezawa1 , T. Toyota1 , W.

              Earth Planets Space, 60, 407–416, 2008 Telescope of extreme ultraviolet (TEX) onboard SELENE: science from the Moon I. Yoshikawa1 , A. Yamazaki2 , G. Murakami1 , K. Yoshioka1 , S. Kameda2 , F. Ezawa1 , T. Toyota1 , W.

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              Source URL: www.terrapub.co.jp

              Language: English - Date: 2008-04-07 22:17:50
              282008 International Workshop on EUV Lithography

              2008 International Workshop on EUV Lithography

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              Source URL: www.euvlitho.com

              Language: English - Date: 2015-07-19 23:31:50
              29Debris transport analysis at the intermediate focus of an extreme ultraviolet light source John Sporre David N. Ruzic

              Debris transport analysis at the intermediate focus of an extreme ultraviolet light source John Sporre David N. Ruzic

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              Language: English - Date: 2015-04-22 08:46:32
                30JOURNAL OF APPLIED PHYSICS 106, 043304 共2009兲 Ionic debris measurement of three extreme ultraviolet sources J. Sporre,1 C. H. Castaño,2 R. Raju,1 and D. N. Ruzic1,a兲 1

                JOURNAL OF APPLIED PHYSICS 106, 043304 共2009兲 Ionic debris measurement of three extreme ultraviolet sources J. Sporre,1 C. H. Castaño,2 R. Raju,1 and D. N. Ruzic1,a兲 1

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                Source URL: cpmi.illinois.edu

                Language: English - Date: 2015-04-22 08:46:32